Receive CSE support at
short notice during difficult
and qualification of your Fab
including tool process matching.
maintenance & applications
training packages, take back
control of your equipment.
Semiconductor Equipment Support & Training
Copyright © Plasma Solutions Limited
Selection of surplus OEM
spare parts & networked with various 2nd source suppliers.
KLA Tencor Overlay: 5300 / Archer / A200 / A300 / A500
KLA Tencor Brightfield: 235X / 236X / 28XX
KLA Tencor Darkfield: AIT 2 / 3 / XP / UV / XUV
KLA Tencor Defect: SP1 / SP2
KLA Tencor Darkfield: PUMA 91XX / 95XX / 98XX
KLA Tencor Thin films: ASET F5x / FX100 / FX200
KLA Tencor Macro: Altair / Viper