Receive CSE support at
short notice during difficult
maintenance issues.
Competitive installation
and qualification of your Fab
metrology equipment
including tool process matching.
Comprehensive CSE
maintenance & applications
training packages, take back
control of your equipment.
Semiconductor Equipment Support & Training
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Selection of surplus OEM
spare parts & networked with various 2nd source suppliers.
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KLA Tencor Overlay: 5300 / Archer / A200 / A300 / A500
KLA Tencor Brightfield: 235X  / 236X / 28XX
KLA Tencor Darkfield: AIT 2 / 3 /  XP  / UV  /  XUV
KLA Tencor Defect: SP1 / SP2
KLA Tencor Darkfield: PUMA 91XX / 95XX / 98XX
KLA Tencor Thin films: ASET F5x / FX100 / FX200
KLA Tencor Macro: Altair / Viper