For over 10 years our team of experienced exOEM equipment engineers have been performing equipment installation, decommissioning or internal tool moves on a range of semiconductor equipment. All installations are to OEM specifications and come with full start-up documentation, fingerprinting & reporting, and can include post installation service support or customer training as required.

We provide fab installation & qualification of the following equipment:

• KLA Tencor - SP1 / SP2 / 2139 / AIT II & XP / CDSEM 8100 / ASEF F5 / UV12XX / Archer
• Applied Materials - CVD / HDP / RTP / PVD
• Tokyo Electron - Alpha 8 / Mark 8 / Act 8 / Act 12
• LAM Research - Rainbow & TCP
• Axcelis & Varian Implant
• Plus a number of other common fab platforms

KLA-Tencor ® equipment installation & maintenance training packages are provided through F-SET, Field Service Equipment Training. Visit F-SET at: www.fsetraining.com

For all other equipment installation requests please contact Plasma Solutions Limited.