Capitalize on your used equipment options. Our team of experienced ex-OEM engineers can provide refurbishment, installation and maintenance on a wide range of semiconductor equipment. Plasma Solutions FSE’s have taken systems from refurbishment thru installation and sign-off numerous times installing systems for device manufacturers and a number large OEM’s globally.

In addition to our technical expertise Plasma Solutions has built alliances with key used-equipment suppliers and refurbishers increasing our range and scope to deliver a comprehensive service within the budget and timeframes your require.

Typical OEM tools supported are:

Applied Materials – all CVD/PVD/CMP & Etch platforms
Tokyo Electron – Track / Etch & Vertical Diffusion Furnace
Varian & Axcelis Implant systems
Lam Research – all etch platforms
Mattson – all platforms
Gasonics / Novellus – all platforms
Silicon Valley Group – track & VTR
Kokusai (Hitachi) Electric – Vertical Diffusion Furnace

Please contact us for more information.