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KLA Tencor Overlay Platform Remanufacturing

We provide factory level KLA Tencor overlay system refurbishments including all major assemblies and components.  Our ex-OEM factory trained experts have a proven track record in complete system rebuilds, to AS NEW condition guaranteed.  12 months warranty is provided with all our remanufactured systems.

PSL optical experts can rebuild Overlay optical assemblies (LINNIK FRM) to achieve the tightest process specifications, deeply inside the OEM's specifications, including optical fine-tuning for difficult customer process wafers and reflective layers.
Key Remanufactured Components & Sub-Systems
NEW system consumables
NEW liquid light guide
NEW System Power Supplies
AS NEW Schneeberger or ETEL  XYT Stage
AS NEW IDE Flotation table
AS NEW FRM Assembly & Z-Stage
AS NEW AMS unit
AS NEW HLS Unit
AS NEW System PC & HD's
AS NEW Yaskawa or Brooks Robot
AS New Yaskawa or Brooks Pre-Aligner
AS New TDK or Asyst IsoPorts Loadport
New standard consumable parts.
Brand new LLG for maximum illumination stability.
Brand new system power supplies.
Fully refurbished with new critical components. 
Fully refurbished with new critical components. 
Fully refurbished with new critical components. 
Fully refurbished & aligned.
Fully refurbished with new critical components.
Fully refurbished PC Box, Fans and Hard Drives.
Fully refurbished with new critical components. 
Fully refurbished with new critical components. 
Fully refurbished with new critical components.
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We have 95% of system parts in stock